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TEM

Transmission Electron Microscopy (TEM) is a technique that enables imaging of ultra-thin samples with high spatial resolution. It is also capable of performing analytical measurements, including characterizing crystallographic phase and orientation, producing elemental maps, and creating images that highlight elemental contrast (dark-field mode). As a result, TEM is the ultimate failure analysis tool for thin-film and integrated circuit (IC) samples.


The most common applications of TEM include:

  • Identification of defects in integrated circuits,
  • Determination of crystallographic phases,
  • Nanoparticle characterization,
  • Catalyst support coverage analysis,
  • Ultra-small area elemental mapping,
  • III-V superlattice characterization, and
  • Crystal defect characterization.