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EDS/EDX

Energy Dispersive X-Ray Spectroscopy (EDS) is a technique that can be used alongside applications such as Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM). When combined with these imaging tools, EDS can determine the elemental composition of individual points or map the lateral distribution of elements across the imaged area, which can be as small as a few nanometers in diameter.


In addition to its most common use of providing imaging and elemental composition of small areas, EDS is also employed for the identification and mapping of elements present in defects.