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XRF

X-ray Fluorescence (XRF) is an analytical technique used to quantify the elemental composition of solid and liquid samples.


XRF has a wide range of applications, including:

  • Measuring metal film thickness up to several micrometers (μm) deep,
  • Performing full-wafer mapping of film thickness with high precision and accuracy,
  • Identifying elements in unknown solids, liquids, and powders, and
  • Determining the composition of metal alloys.